El-Agez, Taher M. (6508010303); Wieliczka, David M. (6603705333); Moffitt, Christopher E. (7003550092); Taya, Sofyan A. (6701381761)
6508010303; 6603705333; 7003550092; 6701381761
2011
Physica Scripta
Spectroscopic ellipsometry time study of low-temperature plasma-polymerized plain trimethylsilane thin films deposited on silicon
84
4
45302
Department of Physics, Islamic University of Gaza, Gaza, Palestine; Department of Physics, University of Missouri-Kansas City, Kansas City, MO, United States; Kratos Analytical Inc., USA, New York, NY, United States
El-Agez, Taher M., Department of Physics, Islamic University of Gaza, Gaza, Palestine; Wieliczka, David M., Department of Physics, University of Missouri-Kansas City, Kansas City, MO, United States; Moffitt, Christopher E., Kratos Analytical Inc., USA, New York, NY, United States; Taya, Sofyan A., Department of Physics, Islamic University of Gaza, Gaza, Palestine
